Carbon tetrafluoride
Release Date: 2022-06-16 10:48:00 Visit: 230
Carbon tetrafluoride is a non-combustible, colorless, odorless compressed gas filled in carbon tetrafluoride cylinders with a saturated vapor pressure of about 2000 psig. Carbon tetrafluoride is the most widely used plasma etching gas in the microelectronics industry. It can be widely used in the etching of thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass and tungsten, cleaning the surface of electronic devices, and solar cells. It is also widely used in the production of laser technology, gas phase insulation, low temperature refrigeration, leak detection agent, control of the attitude of space rockets, and decontamination agent in the production of printed circuits. Due to the chemical stability of carbon tetrafluoride, carbon tetrafluoride can be used in metal smelting, such as: copper, stainless steel, carbon steel, aluminum, Monel, etc.; can also be used in the plastics industry; such as: synthetic rubber, neoprene, poly Urethane.
Precautions
Carbon tetrafluoride is a nonflammable compressed gas. Store in a cool, ventilated warehouse. The temperature in the warehouse should not exceed 60℃. Keep away from fire and heat sources. Protect from direct sunlight. Should be stored separately from flammable or combustible materials. Pay attention to the name of the product and the date of the bottle inspection when accepting it. The advanced warehouse is used first. When handling carbon tetrafluoride, it should be lightly loaded and unloaded to prevent damage to cylinders and accessories. In the event of leakage, personnel in the contaminated area should be quickly evacuated to the upper wind, and isolated, and access should be strictly restricted. It is recommended that emergency responders wear self-contained positive pressure breathing apparatus and general work clothes. Cut off sources of leaks as much as possible. Reasonable ventilation, accelerate the diffusion. Use immediately if possible. The leaking container should be properly handled, repaired and inspected before use.